1. Global Institute of Future Technology, University of Michigan--Shanghai Jiao Tong University Joint Institute, Shanghai Jiao Tong University, Shanghai, China
2. Department of Micro/Nano Electronics, National Key Laboratory of Advanced Micro and Nano Manufacture Technology, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai, China
3. National Key Laboratory of Advanced Micro and Nano Manufacture Technology, Shanghai Jiao Tong University, Shanghai, China