Modeling of Czochralski silicon single crystal growth process based on improved stack autoencoding
Author:
Affiliation:
1. Xi'an University of Technology,National & Local Engineering Research Center of Crystal Growth Equipment and System Integration,Xi'an,China,710048
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9727224/9727236/09727991.pdf?arnumber=9727991
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