Through Silicon Via (TSV) Defect Modeling, Measurement, and Analysis

Author:

Jung Daniel H.ORCID,Kim Youngwoo,Kim Jonghoon J.,Kim Heegon,Choi Sumin,Song Yoon-Ho,Bae Hyun-Cheol,Choi Kwang-Seong,Piersanti Stefano,de Paulis FrancescoORCID,Orlandi AntonioORCID,Kim Joungho

Funder

R and D Convergence Program of the Ministry of Science ICT and Future Planning MSIP and the National Research Council of Science and Technology NST of the Republic of Korea

International Collaborative R and D Program funded by the Ministry of Trade Industry and Energy MKE Korea

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Electronic, Optical and Magnetic Materials

Cited by 41 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Improving the Reliability of Through Silicon Vias: Reducing Copper Protrusion by Artificial Defect Manipulation and Annealing;IEEE Transactions on Semiconductor Manufacturing;2024-05

2. High-frequency Transmission Characteristic Analysis of TSV-RDL Interconnects;IEEE Transactions on Components, Packaging and Manufacturing Technology;2024

3. A DfT Technique for Electrical Interconnect Testing of Circuit Boards with 3D Stacked SRAM ICs;2023 IEEE CPMT Symposium Japan (ICSJ);2023-11-15

4. Reliability Concerns of TSV-Based 3-D Integration: Impact of Interfacial Crack;IEEE Transactions on Components, Packaging and Manufacturing Technology;2023-11

5. A Short Review of Through-Silicon via (TSV) Interconnects: Metrology and Analysis;Applied Sciences;2023-07-18

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