Dual Phase Modulation of CMOS-MEMS Vacuum Sensor
Author:
Affiliation:
1. National Changhua University of Education, NO. 2, Shi-Da Road,Department of Mechatronics Engineering,Changhua,Taiwan,R.O.C.
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/8935261/8942181/08942697.pdf?arnumber=8942697
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