Research on Wafer Temperature Monitoring in IC Process
Author:
Affiliation:
1. University of Electronic Science and Technology of China,Chengdu,China
Funder
National Natural Science Foundation of China
Department of Science and Technology of Sichuan Province
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9797886/9797892/09798054.pdf?arnumber=9798054
Reference7 articles.
1. Wafer temperature measurement in PVD systems using the Co–Si reaction
2. Temperature measurement in RTP: Past and future
3. Fabrication of Ge-on-insulator wafers by Smart-CutTMwith thermal management for undamaged donor Ge wafers
4. A wafer-like apparatus for two-dimensional measurement of plasma parameters and temperature distribution in low-temperature plasmas
5. Nanobonding for Multi-Junction Solar Cells at Room Temperature
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