Analytical Multistage Thermal Model for FEOL Reliability Considering Self-and Mutual-Heating

Author:

Chen Wangyong,Cai Linlin,Zhao Kai,Zhang Xing,Liu Xiaoyan,Du Gang

Funder

National High-Tech Research and Development Program

National Natural Science Foundation of China

Natural Science Foundation of Beijing Municipality

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials

Cited by 17 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

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3. Self-Heating Effect of Device-Circuit with Back-side Power Delivery Network beyond 3nm Node;2024 IEEE International Reliability Physics Symposium (IRPS);2024-04-14

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5. The heat dissipation path of self-heating effects for the SOI MOSFET by considering the BOX layer and the TiN barrier layer;Journal of Physics D: Applied Physics;2024-02-01

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