Scalable Ultrahigh Voltage SiC Superjunction Device Technologies for Power Electronics Applications
Author:
Affiliation:
1. GE Research,Niskayuna,NY,USA,12309
2. Rensselaer Polytechnic Institute,Troy,NY,USA,12180
Funder
Advanced Research Projects Agency
U.S. Department of Energy
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10019319/10019320/10019368.pdf?arnumber=10019368
Reference12 articles.
1. First Demonstration of Dynamic Characteristics for SiC Superjunction MOSFET Realized using Multi-epitaxial Growth Method;tanaka;2018 IEEE Int Electron Devices Meet,2019
2. A Review of SiC IGBT: Models, Fabrications, Characteristics, and Applications
3. Dynamic Switching of 3kV 4H-SiC Charge-Balanced Junction Barrier Schottky (JBS) Diodes
4. Breaking the Theoretical Limit of 6.5 kV-Class 4H-SiC Super-Junction (SJ) MOSFETs by Trench-Filling Epitaxial Growth
5. Demonstration of 2kV SiC Deep-Implanted Super-Junction PiN Diodes
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1. Analysis of Lattice Damage in 4H-SiC Epiwafers Implanted with High Energy Al Ions at Elevated Temperatures;Defect and Diffusion Forum;2024-08-22
2. Single-Event Effects in Heavy-Ion Irradiated 3-kV SiC Charge-Balanced Power Devices;IEEE Transactions on Nuclear Science;2024-08
3. Research of over-2kV, 2.35GW/cm2 β-Ga2O3 Vertical Superjunction Schottky Barrier Diodes;2024 IEEE 2nd International Conference on Power Science and Technology (ICPST);2024-05-09
4. 1 kV Self-Aligned Vertical GaN Superjunction Diode;IEEE Electron Device Letters;2024-01
5. Charge Imbalance Tolerance of 4H-SiC Superjunction Devices Featuring Breakdown Path Variation;IEEE Electron Device Letters;2023-07
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