Particle-in-Cell Simulations With Fluid Metastable Atoms in Capacitive Argon Discharges: Electron Elastic Scattering and Plasma Density Profile Transition-Reference-Cited by-同舟云学术

Particle-in-Cell Simulations With Fluid Metastable Atoms in Capacitive Argon Discharges: Electron Elastic Scattering and Plasma Density Profile Transition

Published:2022-09 Issue:9 Volume:50 Page:2548-2557
ISSN:0093-3813
Container-title:IEEE Transactions on Plasma Science
language:
Short-container-title:IEEE Trans. Plasma Sci.

Author:

Wen De-Qi¹^ORCID,Krek Janez²^ORCID,Gudmundsson Jon Tomas³^ORCID,Kawamura Emi⁴,Lieberman Michael A.⁴,Verboncoeur John P.¹^ORCID

Affiliation:

1. Department of Computational Mathematics Science and Engineering, and the Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, USA

2. Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI, USA

3. Science Institute, University of Iceland, Reykjavik, Iceland

4. Department of Electrical Engineering and Computer Sciences, University of California at Berkeley, Berkeley, CA, USA

Funder

Air Force of Scientific Research (AFOSR) Multidisciplinary University Research Initiatives

National Science Foundation/Department of Energy (NSF-DOE) Partnership

Icelandic Research Fund

AKT Display Division, Applied Materials Corporation

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Condensed Matter Physics,Nuclear and High Energy Physics

Link

https://ieeexplore.ieee.org/ielam/27/9904537/9780881-aam.pdf

Reference42 articles.

1. Phase modulation in pulsed dual-frequency capacitively coupled plasmas

2. Recommended values of transport cross sections for elastic collision and total collision cross section for electrons in atomic and molecular gases;hayashi,1981

3. Edge-to-center density ratios in low-temperature plasmas

4. Electron heating in capacitively coupled plasmas revisited

5. Mersenne twister

Cited by 18 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. New insights in the stratification of an argon positive column plasma. I. Theory;Physics of Plasmas;2024-07-01

2. Self-consistent calculation of the optical emission spectrum of an argon capacitively coupled plasma based on the coupling of particle simulation with a collisional-radiative model;Journal of Physics D: Applied Physics;2024-06-25

3. On the influence of electrode surfaces on the plasma chemistry of a capacitive chlorine discharge;Plasma Sources Science and Technology;2024-06-01

4. Comparing Langmuir probe data and the calculations with optical properties of argon discharge at low pressure;Indian Journal of Physics;2024-04-11

5. Benchmark calculations for anisotropic scattering in kinetic models for low temperature plasma;Journal of Physics D: Applied Physics;2024-03-26