Large-rotation and low-voltage driving of micromirror realized by tense thin-film torsion bar-Reference-Cited by-同舟云学术

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Large-rotation and low-voltage driving of micromirror realized by tense thin-film torsion bar

Published:2006-08 Issue:15 Volume:18 Page:1573-1575
ISSN:1041-1135
Container-title:IEEE Photonics Technology Letters
language:
Short-container-title:IEEE Photon. Technol. Lett.

Author:

Sasaki M.,Yuki S.,Hane K.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Link

http://xplorestaging.ieee.org/ielx5/68/34645/01652956.pdf?arnumber=1652956

Cited by 10 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Micro-Mirrors;Reference Module in Materials Science and Materials Engineering;2016

2. Nonlinear spring effect of tense thin-film torsion bar combined with electrostatic driving;Sensors and Actuators A: Physical;2013-06

3. Wireless Driving of a Micromirror Device by Electoromagnetic Excitation Tuned to Mechanical Resonance of Rotation;Journal of Advanced Mechanical Design, Systems, and Manufacturing;2012

4. High-Performance Electrostatic Micromirrors;Next-Generation Actuators Leading Breakthroughs;2010

5. Bidirectional electrothermal electromagnetic torsional microactuators for large angular motion at dc mode and high frequency resonance mode operation;Journal of Micromechanics and Microengineering;2009-05-22

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