Design and simulation of ultra high sensitive piezoresistive MEMS sensor with structured membrane for low pressure applications
Author:
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx5/5685177/5702594/05702738.pdf?arnumber=5702738
Cited by 17 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. An SOI-Structured Piezoresistive Differential Pressure Sensor with High Performance;Micromachines;2022-12-17
2. The Establishment and Verification of the Sensitivity Model of the Piezoresistive Pressure Sensor Based on the New Peninsula Structure;Journal of Microelectromechanical Systems;2022-04
3. Design of SiC-Doped Piezoresistive Pressure Sensor for High-Temperature Applications;Sensors;2021-09-10
4. Ultra-High Sensitivity MEMS Pressure Sensor Utilizing Bipolar Junction Transistor for Pressures Ranging From −1 to 1 kPa;IEEE Sensors Journal;2021-02-15
5. Investigation of High-Sensitivity Piezoresistive Pressure Sensors at Ultra-Low Differential Pressures;IEEE Sensors Journal;2020-07-15
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