Theoretical and Experimental Study of Comb-Actuated Mirror with Cascaded Structures-Reference-Cited by-同舟云学术

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Theoretical and Experimental Study of Comb-Actuated Mirror with Cascaded Structures

Published:2023-07-30 Issue: Volume: Page:
ISSN:
Container-title:2023 International Conference on Optical MEMS and Nanophotonics (OMN) and SBFoton International Optics and Photonics Conference (SBFoton IOPC)
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Author:

Chen Wenhao¹,Luo Huahuang¹,Duan Mingzheng¹,Tavakkoli Hadi¹,Piyawattanametha Wibool²,Lee Yi-Kuen¹

Affiliation:

1. The Hong Kong University of Science and Technology,Department of Mechanical and Aerospace Engineering,Hong Kong, SAR,China

2. The King Mongkut's Institute of Technology Ladkrabang, Institute for Quantitative Health Sciences & Engineering (IQ), Michigan State University (MSU),Department of Biomedical Engineering,Bangkok,Thailand

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10230902/10230913/10230961.pdf?arnumber=10230961

Reference5 articles.

1. Design Optimization of CMOS- MEMS Staggered Vertical Comb Based Micro Scanners

2. Surface- and bulk- micromachined two-dimensional scanner driven by angular vertical comb actuators

3. Nonlinear frequency response of comb-driven microscanners

4. Comb-Actuated Resonant Torsional Microscanner With Mechanical Amplification

5. MEMS Laser Scanners: A Review

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Accurately estimating the scanning angle of an electrostatic MEMS mirror with a novel damping model;Sensors and Actuators A: Physical;2024-08

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