Author:
Wei Jiang ,Jilong Zhou ,Xin Wang ,Long Wang ,Jinwen Zhang
Cited by
2 articles.
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1. Multiscale modelling of MEMS based Pirani gauges;2023 19th International Conference on Synthesis, Modeling, Analysis and Simulation Methods and Applications to Circuit Design (SMACD);2023-07-03
2. Highly Sensitive Polymer Micro-Mesh for Measurement of Vacuum Packaged MEMS Devices;2020 5th IEEE International Conference on Emerging Electronics (ICEE);2020-11-26