Author:
Li X.Y.,French P.J.,Sarro P.M.,Wolffenbuttel R.F.
Cited by
4 articles.
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1. Design, simulation and fabrication of a MEMS accelerometer by using sequential and pulsed-mode DRIE processes;Journal of Micromechanics and Microengineering;2016-11-23
2. Dry Etching;Reference Module in Materials Science and Materials Engineering;2016
3. Through-Silicon Vias Using Bosch DRIE Process Technology;Ultra-thin Chip Technology and Applications;2010-11-12
4. Micromachining Technology;MEMS: A Practical Guide to Design, Analysis, and Applications;2006