On the Understanding of Defects in Short-Term Negative Bias Temperature Instability (NBTI) for Sub-20-nm DRAM Technology

Author:

Wang Da1ORCID,Zhou Longda1ORCID,Xue Yongkang1ORCID,Ren Pengpeng1,Sun Zixuan2ORCID,Wang Zirui2,Wang Jianping3,Wu Blacksmith3,Ji Zhigang1ORCID,Wang Runsheng2ORCID,Huang Ru2

Affiliation:

1. National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Shanghai Jiao Tong University, Shanghai, China

2. Institute of Microelectronics, Peking University, Beijing, China

3. ChangXin Memory Technologies, Hefei, China

Funder

National Key Research and Development Program of China

National Natural Science Foundation of China

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials

Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Sub-20-nm DRAM Technology under Negative Bias Temperature Instability (NBTI): from Characterization to Physical Origin Identification;2024 IEEE International Reliability Physics Symposium (IRPS);2024-04-14

2. Odyssey of the charge pumping technique and its applications from micrometric- to atomic-scale era;Journal of Applied Physics;2023-12-08

3. Open volume defect accumulation with irradiation in GaN, GaP, InAs, InP, Si, ZnO, and MgO;Journal of Applied Physics;2023-12-08

4. A Comprehensive Review of DRAM NBTI Issues and Solutions;2023 IEEE International Conference on Memristive Computing and Applications (ICMCA);2023-12-08

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