1. Fraunhofer Institute for Electronic, Nano Systems ENAS,Department System Packaging,Chemnitz,Germany
2. Institute for Machine Tools and Production Processes (IWP), Chemnitz University of Technology,Professorship for Forming and Joining,Chemnitz,Germany
3. Fraunhofer Institute for Electronic, Nano Systems ENAS,Department Systems Engineering,Chemnitz,Germany
4. Fraunhofer Institute for Electronic, Nano Systems ENAS,Chemnitz,Germany
5. SHINKO ELECTRIC INDUSTRIES CO., LTD.,Process Development Dept.,Nagano,Japan