TiO<sub>x</sub>/Ti/TiO<sub>x</sub> Film-based Waveguide Bolometric Detector for On-Chip Si Photonic Sensors-Reference-Cited by-同舟云学术

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TiO_x/Ti/TiO_x Film-based Waveguide Bolometric Detector for On-Chip Si Photonic Sensors

Published:2021-12-11 Issue: Volume: Page:
ISSN:
Container-title:2021 IEEE International Electron Devices Meeting (IEDM)
language:
Short-container-title:

Author:

Shim Joonsup¹,Lim Jinha¹,Geum Dae-Myeong¹,You Jong-Bum²,Yoon Hyeonho¹,Kim Joon Pyo¹,Baek Woo Jin¹,Han Jae-Hoon³,Kim SangHyeon¹

Affiliation:

1. School of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST),Daejeon,Republic of Korea

2. National Nanofab Center (NNFC),Daejeon,Republic of Korea

3. Korea Institute of Science and Technology (KIST),Seoul,Republic of Korea

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/9720433/9720494/09720594.pdf?arnumber=9720594

Reference12 articles.

1. Ultracompact on-chip photothermal power monitor based on silicon hybrid plasmonic waveguides

2. On-Chip Optical Gas Sensors Based on Group-IV Materials

3. Quantitative temperature measurement of multi-layered semiconductor devices using spectroscopic thermoreflectance microscopy

4. Mid-Infrared Nanometallic Antenna Assisted Silicon Waveguide Based Bolometers

5. 42 GHz pin Germanium photodetector integrated in a silicon-on-insulator waveguide

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. High-sensitivity waveguide-integrated bolometer based on free-carrier absorption for Si photonic sensors;Optics Express;2022-11-04

2. Free carrier absorption-assisted photodetection using a waveguide-integrated bolometer with flat spectral response for integrated optical sensors;Infrared Sensors, Devices, and Applications XII;2022-09-30

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