Side and Corner Region Non-Uniformities in Grown SiO2 and Their Implications on Current, Capacitance and Breakdown Characteristics
Author:
Bastos J. P.1,
O'Sullivan B. J.1,
Higashi Y.1,
Chasin A.1,
Franco J.1,
Arimura H.1,
Ganguly J.1,
Capogreco E.1,
Spessot A.1,
Horiguchi N.1