Piezoelectric micromachined ultrasonic transducers with increased coupling coefficient via series transduction
Author:
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/7315052/7329057/07329269.pdf?arnumber=7329269
Cited by 22 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. A miniaturized sensing system for liquid level and concentration based on piezoelectric micromachined ultrasonic transducers;Sensors and Actuators A: Physical;2024-10
2. Investigation of performance dependence on transduction diaphragm design for piezoelectric micromachined ultrasonic transducers;Microelectronics Journal;2024-08
3. Progress of MEMS acoustic emission sensor: a review;Sensor Review;2024-06-03
4. An Analytical Method for the Enhancement of Electromechanical Coupling of Piezoelectric Micromachined Ultrasonic Transducers Combined with Pre-Stress;2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS);2024-01-21
5. Multi-frequency broadband piezoelectric micromachined ultrasonic transducer utilizing helmholtz resonance;International Journal of Mechanical Sciences;2023-07
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