Plasma-assisted deposition of a three-layer structure by vacuum and gas arcs-Reference-Cited by-同舟云学术

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Plasma-assisted deposition of a three-layer structure by vacuum and gas arcs

Published:1998 Issue:6 Volume:26 Page:1680-1684
ISSN:0093-3813
Container-title:IEEE Transactions on Plasma Science
language:
Short-container-title:IEEE Trans. Plasma Sci.

Author:

Borisov D.P.,Goncharenko I.M.,Koval N.N.,Schanin P.M.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Condensed Matter Physics,Nuclear and High Energy Physics

Link

http://xplorestaging.ieee.org/ielx4/27/16145/00747886.pdf?arnumber=747886

Cited by 10 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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2. Modification of the structure and properties of commercially pure titanium through nitriding and subsequent TiN coating deposition in a single vacuum cycle;Journal of Physics: Conference Series;2017-05

3. Generation of low-temperature plasma by low-pressure arcs for synthesis of nitride coatings;Journal of Physics: Conference Series;2016-01-14

4. Generation of low-temperature gas discharge plasma in large vacuum volumes for plasma chemical processes;Russian Journal of General Chemistry;2015-05

5. Effective Processes for Arc-Plasma Treatment in Large Vacuum Chambers of Technological Facilities;IEEE Transactions on Plasma Science;2013-08

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