Interface Characteristics, Erosion Behavior, and Thermal Shock Resistance of Al–Ta Alloy Coatings Produced by Arc Spraying
-
Published:2022-11
Issue:4
Volume:35
Page:698-705
-
ISSN:0894-6507
-
Container-title:IEEE Transactions on Semiconductor Manufacturing
-
language:
-
Short-container-title:IEEE Trans. Semicond. Manufact.
Author:
Zhao J. R.1,
Hung F. Y.1ORCID,
Wu S. C.1
Affiliation:
1. Department of Materials Science and Engineering, National Cheng Kung University, Tainan City, Taiwan
Funder
Instrument Center of National Cheng Kung University and the Ministry of Science and Technology of Taiwan
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Cited by
1 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献