Shape and Roughness Extraction of Line Gratings by Small Angle X-Ray Scattering: Statistics and Simulations-Reference-Cited by-同舟云学术

Shape and Roughness Extraction of Line Gratings by Small Angle X-Ray Scattering: Statistics and Simulations

Published:2022-08 Issue:3 Volume:35 Page:425-431
ISSN:0894-6507
Container-title:IEEE Transactions on Semiconductor Manufacturing
language:
Short-container-title:IEEE Trans. Semicond. Manufact.

Author:

Reche Jerome¹^ORCID,Gergaud Patrice¹,Blancquaert Yoann¹,Besacier Maxime²,Freychet Guillaume³

Affiliation:

1. Université Grenoble Alpes, CEA, Grenoble, Leti, France

2. Université Grenoble Alpes, CNRS, Grenoble, LTM, France

3. NSLSII, Brookhaven National Laboratory, Upton, NY, USA

Funder

European Commission, French State and Auvergne-Rhône Alpes region through the Electronic Components and Systems for European Leadership (ECSEL) Project

MadeIn4 part of Important Project of Common European Interest (IPCEI) Microelectronics and French Nano2022 Program

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

https://ieeexplore.ieee.org/ielam/66/9851188/9777758-aam.pdf

Reference18 articles.

1. Programmed line width roughness metrology by multitechniques approach

2. Xi-cam: a versatile interface for data visualization and analysis

3. Analytic form for the power spectral density in one, two, and three dimensions

4. Small angle x-ray scattering measurements of lithographic patterns with sidewall roughness from vertical standing waves

5. Estimation of Line Cross Sections Using Critical-Dimension Grazing-Incidence Small-Angle X-Ray Scattering

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