Measurement of the High-Frequency Impedance of Thin-Film Inductors by Means of a Waferprobe-Reference-Cited by-同舟云学术

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Measurement of the High-Frequency Impedance of Thin-Film Inductors by Means of a Waferprobe

Published:1998 Issue:4_2 Volume:22 Page:861-864
ISSN:0285-0192
Container-title:Journal of the Magnetics Society of Japan
language:
Short-container-title:J. Magn. Soc. Jpn.

Author:

Yamaguchi M.,Takahashi Y.,Arai K. I.,Kikuchi S.

Publisher

The Magnetics Society of Japan

Subject

Electrical and Electronic Engineering,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference10 articles.

1. Fabrication and basic characteristics of dry-etched micro inductors

2. 3) 佐藤敏郎,井上哲夫,冨田宏,谷田部茂,溝口徹彦: 電気学会マグネティックス研究会資料, MAG-96-123 (1996).

3. 4) 斉藤貴伸,筒井和久,矢萩慎一郎,松倉祐輔,遠藤浩,恵下隆,彦坂康己: 電気学会マグネティックス研究会資料, MAG-97-8 (1997).

4. 5) 西原宏幸,山口正洋,荒井賢一,江刺正喜: 電気学会マグネティックス研究会資料, MAG-97-123 (1997).

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1. Magnetic thin-film inductors for RF-integrated circuits;Journal of Magnetism and Magnetic Materials;2000-06

2. Magnetic Characteristics of Mn-Zn Ferrite with CoO Added.;Journal of the Magnetics Society of Japan;2000

3. GHz-drive Magnetic Thin-film Inductor Using CoNbZr Film.;Journal of the Magnetics Society of Japan;2000

4. Microfabrication and characteristics of magnetic thin-film inductors in the ultrahigh frequency region;Journal of Applied Physics;1999-06

5. Reduction of the Loss of a Magnetic Thin-Film Inductor for a GHz-Drive Si-MMIC.;Journal of the Magnetics Society of Japan;1999

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