Modulation-doped silicate glass deposited by low-pressure chemical vapor deposition
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Published:1998-11
Issue:5
Volume:24
Page:385-388
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ISSN:0749-6036
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Container-title:Superlattices and Microstructures
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language:en
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Short-container-title:Superlattices and Microstructures
Author:
Ilg M.,Kraxenberger M.,Uram K.,Sandler N.,Parks C.,Nguyen S.
Subject
Electrical and Electronic Engineering,Condensed Matter Physics,General Materials Science