Analysis of the design space available for high-kgate dielectrics in nanoscale MOSFETs

Author:

Frank David J,Wong Hon-Sum P

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Condensed Matter Physics,General Materials Science

Reference5 articles.

1. CMOS scaling into the nanometer regime;Taur;Proc. IEEE,1997

2. Breakdown measurements of ultra-thin SiO2at low voltage, 2000 Symposium on VLST Technology, Honolulu, Published for IEEE by Widerkehr and Assoc., Gaithersbury, MD;Stathis,2000

3. Fringing induced barrier lowering (FIBL) in sub 100 nm MOSFETs with high-k gate dielectrics;Yeap;Electron. Lett.,1998

4. Generalized scale length for two-dimensional effects in MOSFET’s;Frank;IEEE Electron Device Lett.,1998

5. A new 3-D device simulation formulation, NASCODE VI;Buturla,1989

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