Effect of a Magnetic Filter Across the Exit Hole of a Flat Oxygen Plasma Source
Author:
Affiliation:
1. Kyoto Institute of Technology
2. University of Hyogo
3. National Institute for Fusion Science
Publisher
Japan Society of Plasma Science and Nuclear Fusion Research
Subject
Condensed Matter Physics
Link
https://www.jstage.jst.go.jp/article/pfr/14/0/14_1206088/_pdf
Reference14 articles.
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3. [3] T. Fujii et al., Jpn. J. Appl. Phys. 38, L1466 (1999).
4. [4] T. Yamamoto et al., J. Vac. Soc. Jpn. 60, 292 (2017).
5. [5] H. Himura et al., Jpn. J. Appl. Phys. 54, 01AA05 (2015).
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