THERMALIZATION AND IONIZATION OF METAL ATOMS OF OPERATING ENVIRONMENT AT A METAL ION-SPATTERING SOURCE

Abstract

Fast atoms sputtered on a hot metal surface were suggested for thermalization at a metal ion-sputtering source and for further desorption into a discharge with temperature, which is equal to the temperature of the surface. In the suggested construction of the source, atom thermalization process is realized on an interior surface of an anode of the Penning discharge cell in an oscillation area of ionizing electrons. It has been experimentally shown that the proposed method of thermalization of Fe atoms increases the fraction of Fe+ ions in the extracted ion beam by three times.