Improving Interface Characteristics of Al2O3-Based Metal-Insulator-Semiconductor(MIS) Diodes Using H2O Prepulse Treatment by Atomic Layer Deposition
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Published:2017-07-31
Issue:7
Volume:27
Page:362-366
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ISSN:1225-0562
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Container-title:Korean Journal of Materials Research
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language:
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Short-container-title:Korean. J. Mater. Res.
Author:
Kim Hogyoung, ,Kim Min Soo,Ryu Sung Yeon,Choi Byung Joon
Funder
Seoul National University of Science and Technology
Publisher
The Materials Research Society of Korea
Subject
General Materials Science