基于光学散射仪的T型相变存储器三维形貌参数测量
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Published:2022
Issue:19
Volume:59
Page:1929001
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ISSN:1006-4125
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Container-title:Laser & Optoelectronics Progress
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language:en
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Short-container-title:激光与光电子学进展
Author:
Dong Zhengqiong 董正琼,Yuan Shun 袁顺,Li Chenyang 李晨阳,Tang Shaokang 唐少康,Nie Lei 聂磊
Publisher
Shanghai Institute of Optics and Fine Mechanics
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics