偏心双转子运动抛光工艺研究及中频误差的抑制研究
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Published:2021
Issue:24
Volume:48
Page:2404002
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ISSN:0258-7025
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Container-title:Chinese Journal of Lasers
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language:en
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Short-container-title:中国激光
Author:
Dong Ziming 董子铭,Zhang Yanan 章亚男,Liu Zhigang 刘志刚,Jiao Xiang 焦翔,Zhu Jianqiang 朱健强,Cui Wenhui 崔文辉,Lin Weiheng 林炜恒
Publisher
Shanghai Institute of Optics and Fine Mechanics
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials