Dual-function splitting of the embedded grating with connecting layer

Abstract

We design and optimize the embedded dual-function grating with connecting layer in Littrow mounting. By using modal method and rigorous coupled-wave analysis, grating parameters are analyzed and calculated including grating groove depth, thickness of connecting layer, and so on. The grating device can diffract the transverse electric-polarized plane light mainly in the first-diffractive order with high-diffraction efficiency of 98.36%. Meanwhile, for the transverse magnetic-polarized plane light, the diffraction efficiencies in the zeroth-order and the first-order corresponding to 49.34% and 49.29% are obtained, respectively.