Mechanical Analysis and Experimental Research on Ultrasonic Levitated Conical Rotor Piezoelectric Actuator

Abstract

This work presents a novel conical rotor non-contact piezoelectric actuator based on the principle of near-field acoustic levitation. The conical rotor is levitated and driven by a single stator, while generating two orthogonal standing waves and superimposing a travelling wave vibration on the stator. A frequency sensitivity analysis is conducted for the stator structural parameters, based on a dynamics calculation. An acoustic field simulation is conducted and the sound pressure distribution is obtained. The acoustic radiation force is calculated at different voltages and frequencies. A prototype is fabricated, and the vibration characteristics are experimentally obtained. A test system is built for the actuator, and the conical rotor successfully achieves levitation and rotation. The levitation height and rotation speed of the 3.37[Formula: see text]g rotor are 0.4[Formula: see text]mm and 2300[Formula: see text]r/min, respectively. The acoustic simulations are validated experimentally and show reasonable agreement.