An Analytical Investigation for Vibration Characteristics of a Beam-Type Liquid Micro-Pump

Abstract

This paper studies the characteristics of a micro-beam interacting with an incompressible fluid in a fluid chamber with an opening in its bottom face for fluid flow. The Euler–Bernoulli equation for transverse deformation of an elastic beam is coupled with the fundamental hydrodynamic equation, which is solved by Galerkin and separation of variables method. The 2D fluid flow assumption in Cartesian coordinate has been used. Natural frequencies and mode shapes of wet beam are calculated and compared with the dry beam. The effects of geometrical parameter changes are also computed as a benchmark for the design of the micro-pump. It is observed that fluid coupling causes a decrease for beam’s natural frequencies, especially in higher modes. Furthermore, since the results of the dry and wet beam show a small discrepancy in lower modes, the mode related to the dry beam was employed as the trial function in the forced vibration analysis of the coupled system.