1. Institute of Fundamental Sciences, Kemerovo State University, Kemerovo 650000, Russia
2. Research and Development Department, Kemerovo State University, Kemerovo 650000, Russia
3. Department of Industrial Machinery Design, Novosibirsk State Technical University, Novosibirsk, 630073, Russia
4. R&D Center “Advanced Electronic Technologies”, Tomsk State University, Tomsk 634034, Russia
5. Laboratory of Optical Materials and Structures, Institute of Semiconductor Physics, SB RAS Novosibirsk, 630090, Russia