Chaotic Criterion for Micro-Cantilevers of Atomic Force Microscopes

Abstract

The cantilevered micro-beam is an important component in the field of Atomic Force Microscope (AFM) and its behavior is governed by chaotic dynamics. To better understand these dynamics, a theoretical model based on the Euler–Bernoulli beam model has been developed and experiments have been conducted. The model incorporates both the modified couple stress theory (MCST) and external forces to account for the size-dependent effect and electrostatic load. The reduced model in one degree of freedom is obtained by the Galerkin method. The validity of the reduced model is tested by comparing the results from simulations and published results and experiments. The Melnikov method is then used to detect the chaotic threshold the cantilevered micro-beam. The numerical results test the effects of MCST on the complex responses of the micro-cantilever. Implications of the research can extend to the design and optimization of MEMS devices.