Micro-Raman Scattering Properties of Highly Oriented AlN Films-Reference-Cited by-同舟云学术

Micro-Raman Scattering Properties of Highly Oriented AlN Films

Published:1998-07-30 Issue:19 Volume:12 Page:1963-1974
ISSN:0217-9792
Container-title:International Journal of Modern Physics B
language:en
Short-container-title:Int. J. Mod. Phys. B

Author:

Liu Ming S.¹²,Nugent K. W.¹²,Prawer S.¹²,Bursill L. A.¹²,Peng J. L.¹²,Tong Y. Z.¹,Jewsbury P.²

Affiliation:

1. School of Physics, University of Melbourne, Parkville, Vic 3052, Australia

2. AMRL, Defense Department, Maribyrnong, Vic 3032, Australia

Abstract

Micro-Raman scattering by highly oriented crystalline aluminum nitride has been measured. Phonon modes in AlN were identified in different scattering geometry configurations and scattering polarizations. The phonon modes revealed that aluminum nitride films are highly oriented with the wurtzite c-axis direction normal to the film plane. The Raman scattering modes are broadened and shifted due to grain boundaries and other defects in the films. The defect scattering was analysed using the phonon confinement model. These results were compared with results obtained from X-ray diffraction powder patterns and high-resolution transmission electron microscopy.

Publisher

World Scientific Pub Co Pte Lt

Subject

Condensed Matter Physics,Statistical and Nonlinear Physics

Link

https://www.worldscientific.com/doi/pdf/10.1142/S0217979298001137

Reference33 articles.

1. GaN, AlN, and InN: A review

2. Large‐band‐gap SiC, III‐V nitride, and II‐VI ZnSe‐based semiconductor device technologies

3. High‐brightness InGaN/AlGaN double‐heterostructure blue‐green‐light‐emitting diodes

4. Blue‐violet light emitting gallium nitride p‐n junctions grown by electron cyclotron resonance‐assisted molecular beam epitaxy

5. Candela‐class high‐brightness InGaN/AlGaN double‐heterostructure blue‐light‐emitting diodes

Cited by 25 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Investigating the physical mechanism of ion-slicing in AlN and hetero-integrating AlN thin film on Si(100) substrate;Materials Science in Semiconductor Processing;2024-06

2. Investigation on the polyvinyl alcohol-based composite films with aluminum nitride decorated by silver nanoparticles as thermal fillers;Journal of Polymer Research;2023-04-22

3. Structure and Optical Properties of AlN Crystals Grown by Metal Nitride Vapor Phase Epitaxy with Different V/III Ratios;ACS Omega;2022-06-25

4. Improvement of Crystal Quality of AlN Films with Different Polarities by Annealing at High Temperature;Micromachines;2022-01-14

5. Ultraviolet optical properties analysis of wurtzite AlN films grown by vapor phase epitaxy;Optical Materials;2021-01