1. Guangdong Provincial Key Laboratory of Quantum Engineering and Quantum Materials, Guangdong Provincial Engineering Technology Research Center for Optoelectronic Instrument, School of Physics and Telecommunication Engineering, South China Normal University, Guangzhou 510006, P. R. China
2. Microsystem and Terahertz Research Center, China Academy of Engineering Physics (CAEP), Chengdu 610200, P. R. China
3. Institute of Electronic Engineering, China Academy of Engineering Physics (CAEP), Mianyang 621900, P. R. China