Gate-Extension Overlap Control by Sb Tilt Implantation
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Published:2007-05-01
Issue:5
Volume:E90-C
Page:973-977
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ISSN:0916-8524
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Container-title:IEICE Transactions on Electronics
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language:en
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Short-container-title:IEICE Transactions on Electronics
Author:
SHIBAHARA K.,MAEDA N.
Publisher
Institute of Electronics, Information and Communications Engineers (IEICE)
Subject
Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials