MEMS Technology in the Evolution of Structural Control Strategies

Abstract

The integration of Micro-Electro-Mechanical Systems (MEMS) into structural control strategies represents a transformative step towards more efficient, precise, and resilient engineering applications. This paper reviews the evolution and current state of MEMS technology in the context of structural control, highlighting key fabrication techniques such as wet and dry etching, sacrificial layer technology, and advanced additive manufacturing (AM). We delve into the unique properties and advantages brought by MEMS in various domains, including drug delivery systems, industrial automation, and tissue engineering. Special attention is given to the comparison of traditional and modern MEMS fabrication methods, examining their impact on device performance, cost-efficiency, and application breadth. The emerging synergy between MEMS and nanotechnology, particularly in enhancing sensor capabilities and fostering new biomedical and environmental applications, is also explored. Through a detailed analysis, this paper underscores the significant role of MEMS in advancing structural control mechanisms and outlines future directions for research and application.