Nitrogen dissociation and parametric study in a magnetic pole enhanced inductively coupled Ar-N2plasma (MaPE-ICP)
Author:
Publisher
EDP Sciences
Subject
Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Link
http://epjap.epj.org/10.1051/epjap/2013120324/pdf
Reference20 articles.
1. Diagnostics of N2–Ar plasma mixture excited in a 13.56 MHz hollow cathode discharge system: application to remote plasma treatment of polyamide surface
2. Estimation of dissociation degree of N2 in an inductively coupled plasma by vacuum ultraviolet emission spectroscopy
3. Characterization of an inductively coupled nitrogen-argon plasma by Langmuir probe combined with optical emission spectroscopy
4. Dynamic sheath expansion in a non-uniform plasma with ion drift
5. Probe measurements of electron-energy distributions in plasmas: what can we measure and how can we achieve reliable results?
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