Affiliation:
1. Moscow Polytechnic University
Abstract
The work is devoted to the study of defect formation processes in the near-surface layers of silicon under thermal shock conditions and to the effect of preliminary exposure in a constant magnetic field on this process. As a result of investigations it was established that dislocation half-loops near the local heat source are formed in the near-surface layers of Si (with a depth of up to 30 μm) after a current pulse of density j> 5.1010 A / m2 passing through the metallized film on the silicon surface. In addition, it was found that preliminary exposure of samples in a constant magnetic field leads to an increase in the dislocation density compared to samples not exposed in a magnetic field.
Publisher
Trans Tech Publications, Ltd.
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science
Reference6 articles.
1. C. Ferrari, C. Ghica, E. Rotunno, A study of extended defects in surface damaged crystals, Crystals, Vol. 8, No 2 (2018) 67..
2. B. Gao, S. Nakano, H. Harada, Y. Miyamura, K., Three-dimensional analysis of dislocation multiplication during thermal process of grown silicon with different orientations, Journal of Crystal Growth 474 (2017) 121-129..
3. L. Fedina, A. Gutakovskii, A. Aseev, J. Van Landuyt, J. Vanhellemont, Extended Defects Formation in Si Crystals by Clustering of Intrinsic Point Defects Studied by in-situ Electron Irradiation in an HREM, Physica Status Solidi (A) Applied Research. Vol. 171, No 1 (1999).
4. H. Wang, Q.-H. Qin, The method of fundamental solutions for thermoelastic analysis of functionally graded materials (Book Chapter). Functionally Graded Materials, Nova Science Publishers Inc., New York, (2011).
5. А.A. Skvortsov, S.M. Zuev, M.V. Koryachko, V.V. Glinskiy, Thermal shock and degradation of metallization systems on silicon, Microelectronics International. Vol. 33, No 2 (2016) 102-106..
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