A Multi-Technique Study of Titanium Nitride Films Deposited via Reactive Sputter Deposition
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Published:2000-01
Issue:
Volume:325-326
Page:131-140
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ISSN:1662-9752
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Container-title:Materials Science Forum
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language:
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Short-container-title:MSF
Author:
Walker C.G.H.,Morton S.A.,Charnock J.M.,MacLean E.J.,Brown Norman M.D.
Publisher
Trans Tech Publications, Ltd.
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Cited by
1 articles.
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