Study on the Dynamic Active Confocal Probe Based on Time Difference for Surface Measurement

Abstract

With the development of modern industry, the consciousness of quality monitoring increases rapidly. The requirements to the dimensional control and profile monitoring of the products including the mechanical, optical and electric ones become higher and higher. New, non-contact and convenient instruments are needed to enable people to evaluate their products. A new type of dynamic active confocal probe is developed in this paper. The key point of this new method is that the displacement measurement of the vibrating lens located on the tuning fork is converted to time difference measurement, which is much simpler and assures higher accuracy in measurement. System structure and improvement, electric circuit and signal processing system are discussed. Experimental studies of the probe performance and analyses of the experimental results are presented.