Study on Computer Emulation of PTFE’s Wearability Improvement by Al3+ Ion Implantation

Abstract

The surface material of Elastic-metal pads(EMP) is PTFE which has poor wearability . Ion implantation can improve the wearability of EMP surface .This paper investigated the wearability improvement of the EMP’s surface by Al2O3/PTFE film which generated by ion implantation. The accelerating voltage of the ion implantation apparatus is 40KV and the ion emitting energy of aluminum is 20KeV. The dosages of three kinds of Al3+ ion beams in the study are 1×1015 ions/cm2, 5×1015 ions/cm2 and 1×1016 ions/cm2 respectively. The aluminum ion’s density is 10uA/cm2. The vacuum pressure of the ion implantation is 3×10-3Pa. The experimental specimens modified by Al3+ ion implantation were tested by ESCA, XRD, AFM/FFM and nanometer probe , which got the chemical bond, phase structure and friction coefficient of the film. According to the experimental results, the mathematical model was built using the Fesow Geometric Model and the Halind Rang Theory. The computer simulation was made in which SRIM simulator program was employed. The ion implantation’s energy for the simulation is 20keV and the material density of PTFE is 2.56g/cm³. In addition, the dose is 5×1015 ions/cm², the time interval is 230 minutes and the velocity of Al3+ ion implantation is 2.15-2.20×1013 ions/minute. Finally the simulation curves of particle distribution, energy distribution and impairment etc. were plotted and discussed.