The Design and Testing of Mesopiezoresistive Effect Electromagnetic Driven Micromachined Gyroscope-Reference-Cited by-同舟云学术

The Design and Testing of Mesopiezoresistive Effect Electromagnetic Driven Micromachined Gyroscope

Published:2010-10 Issue: Volume:139-141 Page:1566-1569
ISSN:1662-8985
Container-title:Advanced Materials Research
language:
Short-container-title:AMR

Author:

Wang Rui Rong¹,Du Kang¹,Shi Yun Bo¹,Liu Jun¹

Affiliation:

1. North University of China

Abstract

Resonant tunneling diode (RTD) is a bipolar negative resistance device with the features of high speed, high frequency, low voltage and power, has been proved to have mesopiezoresistive effect, and the current-voltage characteristics of RTD is a function of stress. In the paper, the mesopiezoresistive effect of resonant tunneling diodes and Coriollis effect are both used in the research of gyroscope, so a novel gyroscope structure is proposed. The feasible fabrication process is designed according to present process technology, and the gyroscope is fabricated by GaAs surface micromachining processes and bulk micromachining technology. By the driven experiment it is verify that the gyroscope can be successfully driven. And the range of fabricated gyroscope natural frequency is also obtained, which is larger than 4KHz.

Publisher

Trans Tech Publications, Ltd.

Subject

General Engineering

Link

https://www.scientific.net/AMR.139-141.1566.pdf

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