Synthesis of Adhesive Silicon Nitride Thin Films by Static and Dynamic Ion Mixing Methods
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Published:1998-05
Issue:
Volume:159-160
Page:293-298
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ISSN:1662-9795
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Container-title:Key Engineering Materials
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language:
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Short-container-title:KEM
Author:
Shima Y.,
Hasuyama H.,
Hiramitsu T.,
Fan W.-Y.,
Imaoka Y.,
Watari Takanori1,
Baba K.,
Hatada R.
Publisher
Trans Tech Publications, Ltd.
Subject
Mechanical Engineering,Mechanics of Materials,General Materials Science