Abstract
We analyzed fluctuations of interactions between low pressure reactive plasmas and nanoparticles formed in the plasmas, to shed light on origins of fluctuations of interactions and to control fluctuations in plasma processes. Spatiotemporal fluctuations of nanoparticle density develop not only in a linear way but also in a nonlinear way. The results suggest nonlinear interactions potentially induce spatial and temporal process fluctuations.
Publisher
Trans Tech Publications, Ltd.
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference13 articles.
1. ITRS 2.0, www.itrs2.net.
2. T. W. Foresman, J. Appl. Phys. 46 (2016) 012055.
3. K. Ishikawa, K. Karahashi, T. Ichiki, J. P. Chang, S. M. George, W. M. M. Kessels, H. J. Lee, S. Tinck, J. H. Um, and K. Kinoshita, Jpn. J. Appl. Phys. 56 (2017) 06HA02.
4. S. Nunomura, M. Kita, K. Koga, M. Shiratani, and Y. Watanabe, J. Appl. Phys. 99 (2006) 083302.
5. T. Keya, K. Koga, M. Shiratani, Y. Watanabe, and M. Kondo, Thin Solid Films 506-507 (2006) 288.