Affiliation:
1. Zhongshan Polytechnic University
2. Zhongshan Polytechnic
Abstract
3-D mechanics of magnetic- Pneumatic microfabrication stage includes X, Y-direction horizontal force and vertical direction force. Horizontal force can be resolved by analytical method with magnetic equation while vertical force can be done by isentropic equations.The acceleration is expected to be 8m/s2, and working gap of air bearing is to be 10 um. Experiments show that magnetic flux air gap is below 3.9mm with the current of 2A and working gap of air bearing is 20um with the supporting force of 16kgf to match the dynamic characteristic requirements.
Publisher
Trans Tech Publications, Ltd.
Reference7 articles.
1. Isao Satou. Microelectronic Engineering, Vol, 3, (2001), p.571～577.
2. X. Jansen J W, Lierop C M M, Lomonova E A, et al. IEEE Trans. On Magn., Vol, 43, (2007), pp.15-25.
3. Lars Monch, Matthias Prause. Simulation Conference, 2001Proceedings of the Winter, Vol, 2, (2001), p.1170～1177.
4. Valery M. Dubin. Microelectronic Engineering， Vol, 70, (2003), p.461～469.
5. Valery M. Dubin. Electrochemical aspects of new materials and technologies in microelectronics [J]. Microelectronic Engineering， Vol, 70, (2003), p.461～469.