On the Dynamics of the Micro-Ring Driven by Traveling Bias Voltages

Abstract

There is no literature mentioned the modeling of the microstructures subjected to traveling electrostatic forces. This paper is the first time to present an analytical approach to investigate the dynamics of a micro-ring structure driven by the traveling bias voltage. The traveling electrostatic forces may come from the sequentially-actuated actuating electrodes arranged around the flexible ring. A linearized distributed model considering the electromechanical coupling effect is derived based on the small deflection assumption. According to the analytical results, the stiffness of the micro-ring will be softened periodically with the traveling speed of the driving voltage and the variation increases with the increasing of the voltage.