Affiliation:
1. National Research Tomsk Polytechnic University
Abstract
The mathematical formulation of space-time energy release function of accelerated ions in solids is presented. High-power pulsed ion beam and continuous focused ion beam interaction with metals are considered. The power density of deposited energy and specific energy input in a target have been calculated. A beam energy fraction expended on the collisional sputtering of target atoms has been estimated.
Publisher
Trans Tech Publications, Ltd.
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Cited by
2 articles.
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