Research of Complex PZT Film Base on Shear Mode Energy Harvesting-Reference-Cited by-同舟云学术

Research of Complex PZT Film Base on Shear Mode Energy Harvesting

Published:2014-01 Issue: Volume:884-885 Page:363-369
ISSN:1662-8985
Container-title:Advanced Materials Research
language:
Short-container-title:AMR

Author:

Chen Xiao Jie¹,Qiu Cheng Jun¹,Liu Hong Mei¹,Dou Yan Wei¹,Cao Shan Shan¹

Affiliation:

1. Heilongjiang University

Abstract

The preparation of complex PZT with high d31 piezoelectric performance, which is used to the energy harvesting cantilever in vibration mode, is discussed in this paper. The Si/SiO2/Cr/Au/PT/PZT/PT structure base on (100) silicon crystallographic is growth through a PT transition layer before coating Sol-gel PZT film, which is in favor of the PZT film polarization processing in d31 shear mode. It is shown that the PZT film present the perovskite phase after optimize annealing at 700°C by XRD analysis. Piezoelectric properties test indicated that the PZT film has the coercive field at 23kV/cm and the remnant polarization is 60μC/cm2. The silicon-based cantilever with complex PZT film fabricated by MEMS technology is also given in the paper.

Publisher

Trans Tech Publications, Ltd.

Subject

General Engineering

Link

https://www.scientific.net/AMR.884-885.363.pdf

Reference20 articles.

1. S.P. Beeby, M.J. Tudor, N.M. White, in: Energy harvesting vibration sources for microsystems applications, Meas. Sci. Technol. 17 (2006).

2. S. Roundy, P.K. Wright, J. Rabaey, in: A study of low-level vibrations as a power source for wireless sensor nodes, Comput. Commun. 26(2003), p.1131–1144.

3. Ottman G K, et al, in: Adaptive piezoelectric energy harvesting circuit for wireless remote power supply, [J] . IEEE Trans. On Power Electron, vol. 17(2002),: pp.669-676.

4. R. Amarasinghe, D.V. Dao, T. Toriyama, and S. Sugiyama, in: Development of miniaturized 6-axis accelerometer utilizing piezoresistive sensing elements, Sens. Actuators A, Phys., vol. 134( 2007). p.310–320.

5. P.T. Dong, X.X. Li, H. Yang, H.F. Bao, W. Zhou, S.Y. Li, and S.L. Feng, in: High-performance monolithic triaxial piezoresistive shock accelerometers, Sens. Actuators A, Phys., vol. 141 (2008), p.339–346.